JPH0350331U - - Google Patents
Info
- Publication number
- JPH0350331U JPH0350331U JP11013089U JP11013089U JPH0350331U JP H0350331 U JPH0350331 U JP H0350331U JP 11013089 U JP11013089 U JP 11013089U JP 11013089 U JP11013089 U JP 11013089U JP H0350331 U JPH0350331 U JP H0350331U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- reaction tube
- loaded
- heater
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11013089U JPH0350331U (en]) | 1989-09-20 | 1989-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11013089U JPH0350331U (en]) | 1989-09-20 | 1989-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0350331U true JPH0350331U (en]) | 1991-05-16 |
Family
ID=31658682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11013089U Pending JPH0350331U (en]) | 1989-09-20 | 1989-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0350331U (en]) |
-
1989
- 1989-09-20 JP JP11013089U patent/JPH0350331U/ja active Pending